Curriculum Vitae of Hiroshi Iwai

Transcription

1 Curriculum Vitae of Hiroshi Iwai Birth date and place: April 25, 1949, Tokyo, Japan Nationality: Japan Home address: , Eda-kita, Aoba-ku, Yokohama, , Japan Tel/Fax: Business Address: Frontier Research Center Tokyo Institute of Technology 4259 Nagatsuta, Midori-ku, Yokohama, , Japan Tel: , Fax: or Education: The University of Tokyo, 1992 The University of Tokyo, 1972 Doctor of Engineering, Electrical Engineering B.E. Electrical Engineering Professional Experiences: (a period of three years starting from 22 nd December) D.J. Gandhi Distinguished Chair Professor, Indian Institute of Technology Bombay present Adjunct professor, Hangzhou University of Electronic Science and Technology Honorary Professor, Institute of Microelectronics, Chinese Academy of Sciences (a period of four weeks starting from 22 th December) D.J. Gandhi Distinguished Chair Professor, Indian Institute of Technology Bombay Guest Professor, Ningbo Institute of Material Technology and Engineering,Chinese Academy of Sciences Visiting Professor, University of Tsukuba 2010-(a period of one month starting from 22 th December) D.J. Gandhi Distinguished Visiting Professor, Indian Institute of Technology Bombay Visiting Professor, University of Science and Technology of China

2 Visiting Professor, East China Jiaotong University Visiting Professor, Xinjiang University Adjunct Professor, Xiangtan University 2008-(a period of one month starting from 25 th December) D.J. Gandhi Distinguished Visiting Professor, Indian Institute of Technology Bombay Consultant Professor, Huazhong University of Science and Technology 2006-present Adjunct Professor, Lanzhou Jiaotong University 2002 present Professor, Frontier Collaborative Research Center, Tokyo Institute of Technology Research Planning Officer, Research Strategy Office, Tokyo Institute of Technology 1999 present Professor, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology Chief Specialist, Microelectronics Engineering Lab., Toshiba Corp Senior Research Scientist, ULSI Research Labs., Toshiba Corp Deputy manager, Semiconductor Engineering Device Lab., Toshiba Corp Visiting Scholar, IC Lab., Stanford University NEC-Toshiba Information System Inc Researcher, IC Lab., R & D Center, Toshiba Corp. Development of the first generation of Toshiba's NMOS LSI technology Development of several generations of high density static and dynamic RAM's and logic LSI's. Research on device physics, process technologies related to small-geometry MOSFETs Development of sub-50 nm CMOS technologies Development of RF BiCMOS and RF CMOS technologies. Research on Emerging Technologies: High k gate insulator, plasma doping, Ni salicide, RF CMOS modeling, Ge transister, GaAs MOSFETs, GaN Power MOSFETs. Re-RAM, Diamond semiconductor devices. Professional Academic Activities: [1] 1995 Guest Editor, IEEE Trans. on ED, Special Issue [2] Member, Organizing Committee, IEEE, SISPAD [3] 1996, 1999 Publication Chair, IEEE/JSAP SISPAD'96 and '99 (Int Conf. Simulation of Semicond. Proc.and Dev.) [4] 1997, 1999 ECS Symp on ULSI Science and Technology

3 [5] 1998 Guest Editor, IEEE Trans. on ED, Special Issue [6] 1998 Moderator, Rump session, Symp on VLSI Tech/Circ [7] 1998 Moderator, Rump session, SSDM [8] Subcommittee Chair, IEEE BCTM [9] 1999 Member, Advance Workshop on Frontiers in Electronics Committee [10] 1999 Co-organizer, ECS Symp on ULSI Process Integration '99 [11] Elected Member, IEEE EDS AdCom [12] 1995,1996,1999,2000 Member, Committee, IEEE, IEDM, Mar.1995, 1998 Guest Editor, Special Issues on IEEE Trans on Election Devices [13] 1995, 1996, 1999, 2000 Program Committee Member, IEEE IEDM'95, '96, '99, '00 (International Election Devices Meeting) [14] Editor, IEEE EDS Newsletter [15] 1997,2000 Program Vice Chair, IEEE MIEL '00 and97 (International Conference on Microelectronics) [16] 1999 Session Organizer, IEEE WOFE'99 (Advanced Workshop on 'Frontiers in Electronics) [17] 1999 Publication Chair, IEEE BCTM'99 (Bipolar/BiCMOS Circuit and Technology Meeting) [18] 1999,2000 Program Committee Member, ESSDERC'99, '00 (European Solid-State Device Research Conference) [19] Member, International Committee, IEEE ASDAM*98 [20] 1999,2001 International Advisor IEEE IPFA '99, '01 (International Symp. on Physical and Failure Analysis of ICs) [21] 2000 Program Vice Chair, IEEE BCTM'00 (Bipolar/BiCMOS Circuit and Technology Meeting) [22] 2001 EDS Vice President, IEEE (Electron Devices Society, The Inst. of Electrical & Electronics Eng.) [23] 2001 Technical Program Chair, IEEE BCTM'01 (Bipolar/BiCMOS Circuit and TechnologyMeeting) [24] 2001 Technical Program Chair, IEEE IWGI (Int. Workshop on Gate Insulator) [25] 2001 Executive Committee Chair, IEEE IWJT (Int. Workshop on Junction Technology) [26] 2001 Technical Program Cochair, IEEE ICSIT (Int. Conf. on Solid-State and Integrated Circuit Technology) [27] 2001 Technical Program Subcommittee Chair (CIR) IEEE IEDM (International Electron Devices Meeting) [28] 2001 Executive Committee member ECS Electronics Division [29] 2001 Vice Editor-in-Chief, IEICE Trans. on Electronics [30] 2001 CMOS and Interconnects Reliability, IEEE, IEDM [31] 2001 Moderator, Rump session, Symp on VLSI Tech/Circ [32] 2001,2002 Chair, JEITA Ultra-Low Power Operation Integrated Systems Technical Committee (JEITA: Japan Electronics and Information Technology Industry Association) [33] 2001 Guest member, LETI, Micro electronics and micro technology CST [34] 2002 Program Committee Member, IEEE RAB/TAB Section/Chapter Support [35] Committee 02 (Regional Activities Board/Technical Activities Board)

4 [36] 2002 Committee Member, ECS Symp on Silicon Technology [37] 1994-present Distinguished Lecturer, IEEE EDS [38] 1995-present Member, Investigation Committee, the Institute of Electrical Engineers [39] 1996-present Program Vice Chair, IEEE MIEL [40] Member, IEEE EDS Regions/Chapters Committee [41] Regional Editor, Microelectronics Reliability [42] Asian Coordinator, Advance Research Workshop on Future Trend in Microelectronics [43] 1999-present Committee Member, ECS Symp on ULSI Process Integration [44] Co-organizer, IEEE Japan Ultra-Small Integrated Devices Investigation Committee (IEE Japan: the Institute of Electrical Engineers of Japan) [45] Chair, IEEE EDS Regions/Chapters Committee [46] 2000-present Coeditor-in-chief, IJHSES(International Journal of High Speed Electronics and Systems) [47] 2001-present Executive Committee member, ECS Electronics Division [48] 2002-present Member, ECS DS&T Governing Body [49] 2002 Co-Chair, Technical Program Committee, 2 nd ECS- International Silicon Technology Conference, Tokyo, Japan, September 11-14, 2002 [50] 2002 Executive Committee Member, 2 nd ECS- International Silicon Technology Conference, Tokyo, Japan, September 11-14, 2002 [51] 2002 Organizer, ECS 202 nd Meeting, First International Sympo. on High Dielectric Constant Materials:Materials Science, Processing, Reliability,& Manufacturing Issues Oct , 2002, Salt Lake City, Utah, USA [52] Organizer, ECS Meeting, Sympo. on High Dielectric Constant Materials and Gate Stacks [53] Vice President, IEEE EDS [54] Member, IEEE RAB/TAB Section Chapter Support Committee [55] 2002 General Chair, IEEE BCTM [56] Editor-in-Chief, IEICE Trans. on Electronics [57] Member(Responsible for Technical Symposia Grants), IEEE RAB/TAB Section/Chapter Support Committee [58] Member, National Institution for Academic Degrees and University Evaluation [59] 2003 Member, Sub-committee for Device Reliability, Technical Program Steering Committee (TPSC), IPFA [60] 2003 Organizer, 203 rd ECS Meeting, Sympo. on ULSI Process Integration III, Apr , 2003, Paris, France [61] 2003 Organizer, 204 th ECS Meeting, Sympo. on Second International Symposium on High

5 Dielectric Constant Materials: Materials Science, Processing, Reliability, and Manufacturing Issues, Oct , 2003, Orland, Florida, USA [62] 2003-present International Committee Chair, 2003 IMFEDK (The 2003 International Meeting for Future of Electron Devices, Kansai ) [63] 2003 Member, IEEE TAB Awards and Recognition Committee [64] 2002-present Member, Andrew Grove Award Committee [65] Member, DIMES, DIMES Scientific Council [66] 2004-present Member, IEEE TAB [67] President, IEEE EDS [68] 2004 Co-general chair, ICSTST 2004 [69] 2004 Co-program chair, WOFE 2004 [70] 2004 Program co-chair The 4 th International Workshop on Junction Technology:2004, Shanghai, China, March 15-16, 2004 [71] 2004 E-MRS Spring Meeting, Session IV chair [72] 2004 Co-organizer, 206 th ECS Meeting, the First International Sympo on Dielectrics for Nanosystems:Materials Science, Processing, Reliability and Manufacturing, Oct. 4-7, Honolulu, Hawai, [73] 2004 Co-Organizer, 206 th ECS Meeting, SiGe: Materials, Processing, and Devices, Oct.4-8, Honolulu [74] 2004 General Co-Chairs:7 th International Conference on Solid-State and Integrated Circuits Technology, Beijing, China [75] 2004 International Advisory Committee Member, ECS-ISTC2004, Shanghai, China, September15-17, 2004 [76] 2004-present General Chair, IWJT 2005 [77] 2005 Division Chair, Executive Committee, The 2005Semi-ECS-ISTC, Shanghai, China, March15-17, 2005 [78] 2005 Semiconductor Technology (ISTC 2005)Assistant Editor [79] 2005 Co-organizer, 207 th ECS Meeting, Sympo. on Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, May 16-18, 2005, Quebec City Canada [80] 2005 General Chair The 5 th International Workshop on Junction Technology:(IWJT) 2005, June7-8,2005, Osaka, Japan [81] 2005 Advisory Chair, The 9th Workshop and IEEE EDS Mini-colloquia on NAnometer CMOS Technology Nanoelectronics Workshop in Japan, Yokohama, Japan, Oct. 25, 2005 [82] 2005 Co-Organizer, 208 th ECS Meeting, Third International Sympo. on High Dielectric Constant Gate Stacks III, Oct , 2005, Los Angeles, California, USA [83] 2005 General Chair, The 9th Workshop and IEEE EDS Mini-colloquia on NAnometer CMOS Technology Nanoelectronics Workshop in Japan, Yokohama, Japan, Oct. 25, 2005 [84] 2006 General Chair, The International Workshop on Nano CMOS (IWNC), Mishima, Japan, Jan

6 [85] 2006 Division Chair, ISTC2006, Shanghai, China, March 21-13, 2006 [86] 2006 General Co-Chair, The 6 th International Workshop on Junction Technology:(IWJT) 2006, Shanghai, China, May 15-16, 2006 [87] 2006 Lanzhou Jiaotong University, Adjunct Professor [88] Junior Past President, IEEE EDS [89] Member, IEEE EDS Fellow Committee [90] Member, IEEE EDS TAB Society Review Committee [91] 2006 Organizer, ECS 209 th Meeting, Sympo. on Dielectrics for Nanosystems MaterialsScience:, Processing, Reliability, and Manufacturing II, May 8-10, 2006, Denver,USA [92] 2006, Organizer, 209th ECS Meeting, 10 th International Symposium on Silicon Materials Science andtechnology, May 10-11, 2006, Denver, USA [93] 2006 Co-Program Chair, ICSICT2006, Shanghai, China, Oct [94] 2006 Organizer, 210 th ECS Meeting, Sympo. on Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 2: New Materials, Processes, and Equipment, Oct. 30- Nov.2, 2006, Cancun, Mexico [95] 2006 Organizer, 210 th ECS Meeting, Sympo. on High Dielectric Constant Gate Stacks 4, Oct. 30-Nov.2, 2006, Cancun, Mexico [96] IEEE EDS Nominations and Elections Committee Chair [97] 2007 Co-Chair, ISTC2007, Shanghai, China, March 18-20, 2007 [98] 2007 Organizer, 211 th ECS Meeting, Sympo. on Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment 3, May 7-9, 2007, Chicago, Illinois [99] 2007 Steering Committee member, 2007 International Workshop on Electron Devices and Semiconductor Technology, June 3-4, 2007, Beijing, China [100] 2007 Advisory Committee Chair, The 7 th International Workshop on Junction Technology 2007, June 8-9, 2007 Kyoto, Japan [101] 2007 Organizer, 212 th ECS Meeting, Sympo. on High Dielectric Constant Materials and Gate Stack 5, Oct. 8-10, 2007, Washington, DC [102] 2007 Organizer, 212 th ECS Meeting, Sympo. on ULSI Process Integration 5, Oct. 8-11, 2007, Washington, DC [103] 2008 DIMES Scientific Council [104] 2008 Co-Chair, ISTC2008, March 15-17, 2008, Shanghai, China [105] 2008 Advisory Committee Chair, The 8 th International Workshop on Junction Technology 2008, May 15-16, 2008 Shanghai, China [106] 2008 Technical Co-Chair, 213 th Meeting ECS Sympo on Dielectrics for Nanosystems III: Materials Science, Processing, Reliability and Manufacturing, May 18-23, 2008, Phoenix, Arizona, USA [107] 2007 Program chair, WOFE 2007 [108] IEEE EDS Fellow Committee Chair [109] IEEE EDS Award Committee member [110] IEEE EDS Senior Past President [111] 2009 Advisory Committee Member, ISTC2009, March 17-19, 2009, Shanghai, China [112] 2009 Advisory Committee Chair, The 9 th International Workshop on Junction Technology 2009, June 11-12, 2009, Kyoto, Japan [113] IEEE EDS Distinguished Service Award Committee [114] IEEE Frederik Philips Award Committee [115] 2009 IEEE Divisison 1 Delegate-Elect/Director-Elect

7 [116] ECS Individual Membership Committee member [117] IEEE EDS VLSI Technology and Circuits Committee [118] IEEE Division 1 Delegate/Director [119] 2010 Steering Committee Advisor, ISTC2010, March 18-19, 2010, Shanghai, China [120] 2010 Advisory Committee Chair, The 10 th International Workshop on Junction Technology 2010, May 10-11, 2010 Shanghai, China [121] , ESSDERC Technical Program Committee [122] IEEE Fellow Committee [123] 2011 Program Chair, IEEE EDS Mini-colloquium on Nanometer CMOS Technology (WIMNACT 26), February 9, 2011, Tokyo, Japan [124] 2011 Technical Program Chair, Taiwan-Japan Workshop on Nano Devices, March 3, 2011, Yokohama, Japan [125] 2011 Advisory Committee, International Workshop on THE FUTURE OF NANO ELECTRONICS RESEARCH AND CHALLENGES AHEAD(IWNANO 2011), December 26-28, 2011, Tamilnadu, India [126] 2012 Strategic Planning Committee of the Fellow Committee [127] IEEE David Sarnoff Award Committee [128] ECS Japan Section/Section Officers Second Vice-Chair [129] 2013 IEEE EDSSC 2013 International Advisory Committee [130] Editorial Board, SCIENCE CHINA [131] Advisory Board of the journal Facta Universitatis:Series Electronics and Energetics [132] Member of Advisory Committee, SCIENCE CHINA Information Sciences Honors: 2011 The Institute of Electrical Engineers of Japan(IEEJ) Fellow 2009 The Institute of Electronics, Information and Communication Engineers(IEICE) Fellow 2009 The Commendation for Science and Technology by the Minister of Education, Culture, Science and Technology, Prizes for Science and Technology, Development Category Award 2008 IEEE 2008 EDS Distinguished Service Award th Yamazaki-Teiichi Prize 2007 IEEE BCTM Award 2007 JSAP Fellow 2005 Local Commendation for Invention from Japan Institute of Invention and Innovation 2002 JSAP Award for the best paper 2001 IEEE EDS J.J. Ebers Award 1998 Electronics Award from Electronics Society, IEICE 1997 Elected to IEEE Fellow 1994 IEEE EDS Paul Rappaport Award

8 1994 Grand Prize of the 4th Nikkei BP Technology Awards 1990 Local Commendation for Invention from Japan Institute of Invention and Innovation 1968 Nagoya Mayor Award Society Memberships: Membership: Fellow, IEEE Fellow, The Japan Society of Applied Physics Fellow, The Institute of Electronics, Information and Communication Engineers, Japan Member, Electrochemical Society Member, The Institute of Electronics, Information and Communication Engineers, Japan Member, The Institute of Electrical Engineers of Japan

9 Biography: Hiroshi Iwai received the B.E. and Ph.D. degrees in electrical engineering from the University of Tokyo and worked in the research and development of integrated circuit technology for more than 25 years in Toshiba. He is now a professor of Frontier Collaborative Research Center and Dept. of Electronics and Applied Physics, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Yokohama, Japan. Since joining Toshiba, he has developed several generations of high density static RAM's, dynamic RAM's and logic LSI's including CMOS, bipolar, and Bi-CMOS devices. He has also been engaged in research on device physics, process technologies, and T-CAD related to small-geometry MOSFETs and high speed bipolar transistors. He has authored and coauthored more than 600 journal and conference papers. He has served on many committees of conferences and editors of journals, as well as a member of many evaluation committee of public organizations. For example, the President of the IEEE EDS, an elected member of the IEEE EDS AdCom, an editor of IEEE EDS Newsletter, a guest editor of IEEE Trans. on Electron Devices, and an editor of the Proceedings of ECS Symp. on ULSI Process Integration. He is now the IEEE Division 1 Director for and ECS Individual Membership Committee member for He serves as a visiting professor for many Chinese and Indian universities. His awards include Local Commendation for Invention from Japan Institute of Invention and Innovation (1990, 2005), Grand Prize of Nikkei BP Technology Awards (1994), IEEE EDS Paul Rappaport Award (1994), IEICE ES Electronics Award (1998), IEEE EDS J.J.Ebers Award (2001), and JSAP Award for the best paper (2002), IEEE BCTM Award (2007), Yamazaki-Teiichi Prize (2007), IEEE 2008 EDS Distinguished Service Award (2008), The Commendation for Science and Technology by the Minister of Education, Culture, Science and Technology, Prizes for Science and Technology, Development Category Award (2009). His current research interests are Nano CMOS and Emerging Technologies: High k gate insulator, Si Nanowire MOSFETs, plasma doping for ultra-shallow junctions, Ni salicide, RF CMOS modeling, and Ge transisters. Dr. Iwai is, a fellow of IEEE, a member of Electrochemical Society, a fellow of the Japan Society Applied Physics, and a fellow of the Institute of Electronics, Information and Communication Engineers of Japan.