Commercialising Research for Nanofabrication High Value Manufacturing Event - Oxford Dr Alec Reader - 13th December 2006
Introduction to Innos Technology Act as a bridge between academia and Industry from Research to prototype, low volume production and Technology transfer. Research Innos makes very small things Feature sizes down to 10nm 100% owned by University of Southampton UK Centre of Excellence in Microfabrication Product 30 Facility destroyed by fire October 2005 Fabrication in Eindhoven High-Tech Campus NL New facility Millbrook, Southampton, UK staff 9 PhD engineers and scientists Experienced technicians and operators Strong commercial management team
The New Southampton Clean Room The Silicon Micro Fabrication Facility at the University of Southampton (established in 1970) commenced operations as a stand-alone company Innos Ltd in April 2004. Capitalising on the 30+ years of advanced innovation and processing experience. Innos will continue to push the boundaries of processing and materials technology. The new cleanroom facility to be opened at the beginning of next year in Southampton. Providing a bridge between pure research processing and volume production fabs, Innos offers a one-stop facility for Prototypes, Product Demonstrators or small scale production. Adopting a business strategy of collaborative research, pure sub-contract R&D or foundry processing for small scale production, Innos will help your business develop and exploit new technologies.
Capability and Business offering MEMS & BioMEMS Contract research CMOS, Power Bipolar Foundry Processing Advanced Materials Prototyping Photonics Product Demonstrators Nano Low Volume Production
Examples of how Innos has helped early-stage companies and academics to manufacture and commercialise their ideas Mesophotonics: Stratophase: University of Southampton: Month Eye - from IP, R&D - to demonstrator (prototype) Perpetuum:
Fabrication of a Nano-product Mesophotonics : From idea in University of Southampton to prototype Prototype allowed VC-funding / Company set-up Continued with the development of product close collaboration with Mesophotonics Moved to low-volume production Acted as foundry for their fab-less model asset-light model for start-up Mesophotonics is a development, design, sales and marketing organisation - supported by Innos
Powering a NEMS start up company a case study
Energy Harvester (Perpetuum) Fabrication process Grow 1mm SiO2, Deposit 160nm Si3 N4 Photolith trench, Dry etch SiO2 and Si3N4 KOH etch Si Strip SiO2 and Si3N4, evaporate 1mm Al, Photolith and wet etch Al contact pads Photolith Si paddle SPR220 resist, 20mm thick DRIE Si through wafer Strip resist
Objective self contained sensor system Microgenerator Wireless comms MEMS sensor Electronics Wide range of applications Simple installation stick on, or mix in to building materials Self configuring wireless network Choice of interface: ZigBee (IEEE802.15.4), WI-Fi (802.11), GPRS etc
Moths provide an eye opener on reflection Etched moth eye nanopattern Copyright: Darren Bagnall Collaboration between the University of Southampton and Innos Ltd. Objective: to create nanoscale patterns on the surface of a silicon solar cell that could help it collect more light Copying the properties of moths eyes could improve the efficiency of solar cells. The patterns are based on the structures on the surface of the eyes of night-flying moths. Current solar cells tend to reflect light when the sun is low in the sky, but applying patterns like those on the moths eyes would reduce much of this reflection and increase light collection by around 10%.
The Innos Vision Future: Research to be done in Eindhoven Pilot-Line manufacturing in Southampton Technology Transfer from Southampton CR to other
Alec.reader@innos.co.uk +44 (0) 870 874 6667 Innos can help commercialise IP or research ideas HVME OXFORD 13th December 2006 Thank you for your attention Alec Reader