TEKES and Small & Medium sized Enterprises - PICOSUN VIEW

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1 TEKES and Small & Medium sized Enterprises - PICOSUN VIEW Juhana Kostamo Managing Director Picosun Oy Eemeli Workshop November 12, 2012

2 Tekes and SMEs Tekes funding for SMEs Altogether 610 M of funding was given to companies and research organizations in year M company funding SMEs received 58% of the company funding New net jobs have been created by SMEs, not large companies Source: Jukka Häyrynen, Nanotechnology 2012 Event, Helsinki 2 Picosun Proprietary and Confidential

3 Picosun and Tekes - Background Picosun Oy (Ltd) established in 2004 Profitable for 6 consecutive years, 67 % growth in FY 2011 Grown from 4 to 40 people and contributes to employment of people at more than 40 subcontracting companies Has received TEKES funding in company projects since 2005 Takes part in several Tekes funded joint research and company projects 3 Picosun Proprietary and Confidential

4 Applications Our Focus: ALD Technology IC: Gate dielectrics & metals; DRAM; Metal Interconnects; Barriers/Seed/Adhesion; Capacitors Optics: OLED layers; Optical filters; Transparent conductors; Antireflection; Photonic crystals; UV blocking; Colored coatings MEMS: Passivation; Etch resistance; Hydrophobic / antistiction Photovotaics: Buffer layer; Passivation; Nanotech: Nano tubes & wires, Nano pores & particle ; Nano-glue Chemical: Catalysis; Fuel cells Other: Biocompatible; Magnetic; Solid lubricants; Anti-corrosion; Mold and dies; Blade edges; Food and Pharmaceutical Packaging; Capacitor; Magn. Head; MEMS III-V, Catalyst Dr. T. Suntola Picosun Board of Directors Electroluminescence Picosun Proprietary and Confidential

5 COLLABORATIVE RESEARCH PROJECTS TEKES FUNDED COLLABORATIVE RESEARCH PROJECTS 5 Picosun Proprietary and Confidential

6 It takes a lot of time and research funding to get from Projects to Production R&D Projects Year 1-3 New Applications Year 4-5 Production Year 6-6 Picosun Proprietary and Confidential

7 Collaborative research projects lead to breakthroughs in industrial applicatons OUR RESEARCH PROJECTS WITH TEKES National Level Projects as company participant European Level Projects as beneficiary with TEKES funding 7 Picosun Proprietary and Confidential

8 Research projects are important in building up a collaboration network between the project partners Partnering Companies New Source chemicals Thin film materials Processes Applications Universities and Research Institutes Customer Companies EU Programs 8 Picosun Proprietary and Confidential

9 COMPANY PROJECTS OUR PREVIOUS AND CURRENT TEKES FUNDED COMPANY PROJECTS AND SOME OF THE OUTCOMES 9 Picosun Proprietary and Confidential

10 The Start: PICO-ALD project Manual or semi-automatic for research and development Highly versatile, modular and customizable for single/batch wafer, 3D, through-porous, particle samples PICOSUN R-series ALD tools 10 Picosun Proprietary and Confidential

11 Towards IC production: PICOPRO project Picoplatform cluster tools Platforms with mm ALD systems Load chamber with MESC gates Automatic loading Thermal and plasma ALD modules available Installation for e.g. Aalto/VTT here at Micronova in December 11 Picosun Proprietary and Confidential

12 Plasma metallization tool: ENIAC ESiP project PICOSUN Picoplasma system 12 Picosun Proprietary and Confidential

13 Breakthroughs in wafer batch processing: PICOBATCH project PICOSUN P-300 and P-1000 batch ALD tools 13 Picosun Proprietary and Confidential

14 Other additional options developed in Tekes company projects since 2005 Enhanced diffusion with Picoflow Glovebox integration UHV compability 14 Picosun Proprietary and Confidential

15 In-line Continuous ALD processing: Picohorizon project PICOSUN R-200C and P1200C systems Continuous ALD systems are developed in Picohorizon Tekes Project 15 Picosun Proprietary and Confidential

16 Summary and observations Tekes funding has enabled new applications, ALD processes, tools and methods to be developed and protected Tekes funding has been a necessary support for our continuous R&D work and growth Tekes has given valuable feedback and tutoring on our ideas and business models Collaborative projects have enabled networking, development of new ideas into projects and getting feedback, references, publications and presentations Tekes funding has helped to hire more people and keep our ownership and production in Finland In some European project calls the national funding allocation has not been enough to support our projects, although projects have been approved 16 Picosun Proprietary and Confidential

17 Thank you for your attention! Finnish innovations inside You are welcome to visit us for more info at: or at Picosun factories, Masalantie 365, Masala Jobs at Picosun: